Hah, D. Et Al. 2004. Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.13 , 279-289.

Hah, D., Huang, S., Tsai, J., Toshiyoshi, H., & Wu, M., (2004). Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.13, 279-289.

Hah, DOOYOUNG Et Al. "Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.13, 279-289, 2004

Hah, DOOYOUNG Et Al. "Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.13, pp.279-289, 2004

Hah, D. Et Al. (2004) . "Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.13, pp.279-289.

@article{article, author={DOOYOUNG HAH Et Al. }, title={Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators}, journal={JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year=2004, pages={279-289} }